The material in this Field Guide to Optical Lithography is a distillation of material I have been putting together for the last 20 years or so. I have been subjecting students in my graduate-level lithography course at the University of Texas at Austin to my disorganized notes for 14 years, and have published some similar material in my first book Inside PROLITH and my column in Microlithography World called âThe Lithography Expert.â However, the challenge here was not in creating the material for the book but rather deciding what material to leave out and how to make what remained as condensed as possible. As people who know me can attest, I am rarely lacking for words and brevity is not my strong suit (I am a lousy poet). I hope, however, that the kind reader will forgive me when one page on a topic of interest does not satisfyâit is an unavoidable consequence of the Field Guide format, and my own limitations as an overly verbose writer.
I thank Jeff Byers, William Howard, and Rob Jones for their help in reviewing the draft manuscript of this Field Guide. My many mistakes kept them quite busy.
This Field Guide is dedicated to my wife Susan and our daughter Sarah, who have taught me that there is indeed something more fun in this world than lithography.
© 2006 Society of Photo-Optical Instrumentation Engineers