Subaperture Stitching Interferometry: Jigsaw Puzzles in Three-Dimensional Space

Subaperture Stitching Interferometry: Jigsaw Puzzles in Three-Dimensional Space
Author(s):    Shanyong Chen; Shengyi Li; Yifan Dai
Published:   2016
DOI:             10.1117/3.2242227
eISBN: 9781510602236
Description:

Wavefront interferometry is a standard solution when measuring optical surface error or wavefront aberrations. However, the lateral range of measurement is usually limited by the aperture of the interferometer. Subaperture stitching interferometry solves this probem by dividing the full aperture into a series of smaller, overlapping subapertures that are measured individually before being stitched back together. This Spotlight introduces the mathematical background, stitching algorithms, and subaperture lattice design for stitching interferometry with null subapertures, non-null subapertures, and near-null subapertures as applied to large flats, high-numerical-aperture spheres, and aspheres.

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Aspheres are widely used in modern optical systems because of their advantage of promising higher image quality with fewer elements compared with traditional spherical systems. Surface figure metrology becomes more challenging as increasingly higher performance demands aspheres with a larger aperture, higher accuracy, and even more complex surface forms, e.g., larger slope variation or a freeform surface.

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