MOEMS: Micro-Opto-Electro-Mechanical Systems

MOEMS: Micro-Opto-Electro-Mechanical Systems
Editor(s):    Manouchehr E. Motamedi
Published:   2005
DOI:             10.1117/3.2265061
eISBN: 9781510607873  |  Print ISBN13: 9780819450210
Description:

This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.

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The history of integrated circuits (ICs) started in Bell Labs as early as 1947 when Bardeen and Brattain succeeded in the development of the first point-contact transistor utilizing semiconductor materials. The point-contact transistor was not a practical product, since it was hard to fabricate even as a separate device.

In 1951, commercialization began in earnest when the junction transistor was developed by Shockley, and within a decade it was being used in telephone systems, hearing aids, and radios.

Parallel to the invention of the transistor, in 1952, single crystal silicon was grown by Texas Instruments for use in transistors. During the same time, Bell continued in the development of several major components of photolithography, such as oxidation, diffusion, and etching with the use of photomasks, the fundamental tools in today's IC processing.

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