Improving measurement resolution in white light interferometry

Dongning Wang; Chester Shu

doi:10.1117/12.372979

9 December 1999 Improving measurement resolution in white light interferometry

Dongning Wang, Chester Shu

Proceedings Volume 3860, Fiber Optic Sensor Technology and Applications; (1999) https://doi.org/10.1117/12.372979
Event: Photonics East '99, 1999, Boston, MA, United States

Abstract

In white light interferometry, the measurement resolution is limited relatively by the coherence length of the light source, usually in tens of fringes. By the use of two wavelength combination and multi-wavelength combination source approaches, the equivalent coherence length can be decreased to a few fringe level and nearly one fringe level respectively. By employing a discrete fringe pattern transform technique, the equivalent coherence length can be further reduced to a sub-fringe level, representing a high potential in high precision white light interferometric measurement.

Citation Download Citation

Dongning Wang and Chester Shu "Improving measurement resolution in white light interferometry", Proc. SPIE 3860, Fiber Optic Sensor Technology and Applications, (9 December 1999); https://doi.org/10.1117/12.372979

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