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Processing: Pattern Transfer
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p9
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Abstract
This excerpt gives a succinct explanation of Processing: Pattern Transfer.
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KEYWORDS
Photoresist materials
Etching
Plasma
Ions
Lithography
Image processing
Wet etching
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