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Fourier Optics
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p17
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Abstract
This excerpt gives a succinct explanation of Fourier Optics.
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KEYWORDS
Fourier optics
Diffraction
Photomasks
Fourier transforms
Lens design
Objectives
Image acquisition
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