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Immersion Lithography: Depth of Focus
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p32
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Abstract
This excerpt gives a succinct explanation of Immersion Lithography: Depth of Focus.
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KEYWORDS
Immersion lithography
Binary data
Diffraction
Optical lithography
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