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Photoresist Bleaching and the Dill Parameters
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p42
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Abstract
This excerpt gives a succinct explanation of Photoresist Bleaching and the Dill Parameters.
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KEYWORDS
Photoresist materials
Ultraviolet radiation
Absorption
Absorbance
Americium
Optical lithography
Picture Archiving and Communication System
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