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NILS: Total Process Optimization
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p60
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This excerpt gives a succinct explanation of NILS: Total Process Optimization.
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KEYWORDS
Nanoimprint lithography
Image transmission
Image processing
Photomasks
Data processing
Transmittance
Diffraction
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