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Overlay Control
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p65
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Abstract
This excerpt gives a succinct explanation of Overlay Control.
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KEYWORDS
Lithography
Overlay metrology
Semiconducting wafers
Integrated circuits
Printing
Tolerancing
Transistors
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