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Rayleigh Criteria: Depth of Focus
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p75
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Abstract
This excerpt gives a succinct explanation of Rayleigh Criteria: Depth of Focus.
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KEYWORDS
Wavefronts
Diffraction
Wafer-level optics
Image resolution
Lithography
Photomasks
Semiconducting wafers
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