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Ebook Topic:
Resolution Enhancement Technologies
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p77
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Abstract
This excerpt gives a succinct explanation of Resolution Enhancement Technologies
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KEYWORDS
Resolution enhancement technologies
Photomasks
Lithographic illumination
Optical proximity correction
Lithography
Polarization
Polarization control
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