Phase-Shift Masks

Ebook Topic:
Phase-Shift Masks

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p78

Abstract

This excerpt gives a succinct explanation of Phase-Shift Masks.
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Cited by 1 scholarly publication and 1 patent.

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KEYWORDS

Photomasks

Transmittance

Glasses

Phase shifts

Quartz

Binary data

Mask making

Keywords/Phrases