Off-Axis Illumination

Ebook Topic:
Off-Axis Illumination

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p83

Abstract

This excerpt gives a succinct explanation of Off-Axis Illumination.
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Cited by 3 scholarly publications.

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KEYWORDS

Lithographic illumination

Photomasks

Diffraction

Control systems

Lithography

Objectives

Optical lithography

Keywords/Phrases