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Lithography Simulation
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p85
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Abstract
This excerpt gives a succinct explanation of Lithography Simulation.
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KEYWORDS
Lithography
Optical proximity correction
Computer simulations
Control systems
Manufacturing
Optical lithography
Optics manufacturing
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