Binary Lithography

Ebook Topic:
Binary Lithography

Book: Field Guide to Digital Micro-Optics

Author(s): Bernard C. Kress

Published: 2014

https://doi.org/10.1117/3.1002609.ch128

Abstract

This excerpt gives a succinct explanation of binary lthography.
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KEYWORDS

Binary data

Lithography

Micro optics

Optical components

Chemical elements

Diffraction

Indium

Keywords/Phrases