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Direct-Write Lithography
Book: Field Guide to Digital Micro-Optics
Author(s): Bernard C. Kress
Published: 2014
https://doi.org/10.1117/3.1002609.ch138
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Abstract
This excerpt gives a succinct explanation of direct-write lithography.
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KEYWORDS
Direct write lithography
Electron beam lithography
Analog electronics
Binary data
Etching
Lithography
Micro optics
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