CONFERENCE PROCEEDINGS
Advanced Search
Home > eBooks > Field Guide to Optical Lithography > Processing: Photoresist Spin Coating
Ebook Topic:
Processing: Photoresist Spin Coating
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p4
Author Affiliations +
Abstract
This excerpt gives a succinct explanation of Processing: Photoresist Spin Coating.
Online access to SPIE eBooks is limited to subscribing institutions.
TOPIC
DOWNLOAD PDF SAVE TO MY LIBRARY
Buy this book on SPIE.org
Buy this book on SPIE.orgBuy this book on SPIE.org
Lens.org Logo
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Photoresist materials
Coating
Semiconducting wafers
Liquids
Solids
Humidity
Optical lithography
Subscribe to Digital Library
Receive Email Alerts on Newly Released Titles
Back to Top