MEMS Beam Steering for Lidar

Ebook Topic:
MEMS Beam Steering for Lidar

Book: Field Guide to Lidar

Author(s): Paul McManamon

Published: 2015

https://doi.org/10.1117/3.2186106.ch103

Abstract

This excerpt gives a succinct explanation of MEMS beam steering for lidar.
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Cited by 1 scholarly publication.

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KEYWORDS

Microelectromechanical systems

Mirrors

LIDAR

Beam steering

Reflectivity

Micromirrors

Phase shifts

Keywords/Phrases