Design for Manufacturability

doi:10.1117/3.2217861.ch3

Book: Design Technology Co-Optimization in the Era of Sub-Resolution IC Scaling

Author(s): Lars W. Liebmann, Lawrence Pileggi, Kaushik Vaidyanathan

Published: 2016

https://doi.org/10.1117/3.2217861.ch3

Author Affiliations +

Abstract

Design for manufacturability (DFM) is a term that collectively describes the rules, tools, and methodologies that act on the physical design of a chip to manipulate the on-wafer rendering of IC shapes to optimize the profitability of the product by facilitating rapid yield ramp at high performance with cost effective and predictable manufacturing processes while maintaining a competitive design point. DFM addresses many diverse and technically complex facets of the design flow, as illustrated in Fig. 3.1. A few of the most important aspects of DFM are reviewed here primarily to distinguish DFM from DTCO.