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Metallization
Book: Introduction to Semiconductor Manufacturing Technology, Second Edition
Author(s): Hong Xiao
Published: 2012
https://doi.org/10.1117/3.924283.ch11
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Abstract
Various types of conductors are applied in IC chip manufacturing. Metals with high conductivity are widely used for the interconnections that form microelectronic circuits. Metallization is an adding process that deposits metal layers on a wafer surface.
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CHAPTER 11
 56 PAGES
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KEYWORDS
Metals
Manufacturing
Microelectronics
Semiconducting wafers
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