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Critical Dimension Control: Effect on Devices
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p64
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Abstract
This excerpt gives a succinct explanation of Critical Dimension Control: Effect on Devices.
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KEYWORDS
Transistors
Control systems
Clocks
Critical dimension metrology
Logic devices
Optical lithography
Printing
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