Optical MicrosystemModeling and Simulation

Korvink, Jan G., Univ. of Freiburg; Nathan, Arokia; Baltes, Henry

doi:10.1117/3.2265068.ch3

Book: MEMS and MOEMS Technology and Applications

Editor(s): Prosenjit Rai-Choudhury

Author(s): Jan Korvink, Arokia Nathan, Henry Baltes

Published: 2000

https://doi.org/10.1117/3.2265068.ch3

Author Affiliations +

Abstract

The field of optical microsystem modeling is reviewed with special emphasis on the equations of motion, constitutive equations, solutionmethods, and applications. The phenomena covered include acoustics, heat transport, optics, and couplings such as thermoelasticity, piezoelectricity, and photoelasticity in a single, unified formalism. Progress in microsystem technology is echoed by the availability of production quality computer-aided design (CAD) tools. In this section we review the growth of this field. Next we make some clarifying definitions before progressing to an example of micro-optoelectromechanical systems (MOEMS) simulation, the digital micromirror. The last subsection introduces the rest of the chapter.