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Fabrication of vertical-spring-type micromirror with SiO2 shielding screen and composite-layered mirror plate
Phase-locked loop-based microdisplacement/capacitance measurement and control system and its application to MEMS
Micromechanical structure development for chemical analysis: study of porous silicon as an adsorbent
Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes