PROCEEDINGS VOLUME 4182
MICROELECTRONIC MANUFACTURING | 18-19 SEPTEMBER 2000
Process Control and Diagnostics
Editor(s): Michael L. Miller, Kaihan A. Ashtiani
Editor Affiliations +
IN THIS VOLUME

7 Sessions, 44 Papers, 0 Presentations, 0 Posters
MICROELECTRONIC MANUFACTURING
18-19 September 2000
Santa Clara, CA, United States
Line Control and Diagnostics I
Christopher A. Bode, Anthony J. Toprac, Richard D. Edwards, Thomas F. Edgar
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410061
Alexander J. Pasadyn, Anthony J. Toprac, Thomas F. Edgar
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410070
Richard Oechsner, Thomas Tschaftary, Stefan Sommer, Lothar Pfitzner, Heiner Ryssel, Harald Gerath, Christine Baier, Martin Hafner
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410080
Chin-Yu Ku, Tan Fu Lei, Jia-Min Shieh, Tsann-Bim Chiou, Yung-Cheng Chen
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410094
Tammie Ogasawara, Brian Izzio
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410101
Lay Lay Lee-Aquila, Charles D. Schaper, Weng Khuen Ho
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410103
Line Control and Diagnostics II
Tomasz Brozek, Cory Norton
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410104
Dmitriy N. Marinskiy, Jacek J. Lagowski, M. Wilson, Lubek Jastrzebski, R. Santiesteban, Kim Elshot
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410062
Metrology and Sensors
Mark E. Yelverton, Michael J. McBride
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410063
Gary X. Cao, Nancy J. Wheeler, Alan S. Wong
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410064
Ronald A. Powell, Derryck Settles, Larry Lane, Carlos L. Ygartua, Arun R. Srivatsa, Clive Hayzelden
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410065
William C. Johnson, Ronald A. Powell, Lou Koppel, Erich Klawuhn, Tarak Suwwan de Felipe
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410066
Pierre Boher, Christopher Pickering, Alexandre Tarnowka, Jean-Philippe Piel, Patrick Evrard, Jean-Louis P. Stehle
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410067
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410068
H. M. Sheng, Chen-Cheng Kuoe, L. G. Terng, Dong S. Cheng, Yung H. Liao, Joseph Guo
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410069
Reliability I
Miguel Recio, Miguel Alonso Merino, Carlos Mata, Victorino Martin Santamaria, Jose Angel Ayucar, Julian Moreno, Agustin Godino, Alfonso Lorenzo, Ana Sacedon, et al.
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410071
Xavier Gagnard, Olivier Bonnaud
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410072
Ting Cheong Ang, Man Siu Tse, Sang Yee Loong, Y. C. Wong, Wye Boon Loh
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410073
Peter J. Jacob, Giovanni Nicoletti
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410074
Sean Foley, James Molyneaux, Alan Mathewson
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410075
Mary Sue V. Haydt, Samiha Mourad
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410076
Floarea Baicu, Sever Irin Spanulescu, Anca E. Gheorghiu
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410077
Reliability II
Ana Sacedon, Jesus Inarrea, Manuel Alvarez, Pilar Prieto, Jose C. Plaza, Jose L. Hernandez, Carlos Martinez, Salvador Fernandez, Pablo S. Dominguez, et al.
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410078
Hyungkun Kim, Hong Zhou, S. Chungpaiboonpatana, Frank G. Shi, S. Machuga, J. Adam
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410079
Yield Enhancement and Failure Analysis
Julie Segal, Tom T. Ho, Arman Sagatelian
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410081
Lynette K. Ballast, Tim Z. Hossain, Alan Campion
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410082
Benjamin D. Buckner, E. Dan Hirleman
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410083
Sivan Lachman-Shalem, Nir Haimovitch, Eitan N. Shauly, Daniel R. Lewin
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410084
Shani Keysar, Noah Shafry, Ilan Rabinovitch, Rafi Mor, Marcelo Wolovelsky, Denny Hannan, Zohar Neidik
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410085
Zong Min Wu, Chong Khiam Oh, Soh Ping Neo, Shailesh Redkar
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410086
Poster Session
Chin-Yu Ku, Tan Fu Lei, Jia-Min Shieh, Tsann-Bim Chiou, Hwang-Kuen Lin
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410087
Kazimierz Jerzy Plucinski, Ivan V. Kityk, Adi Kassiba
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410088
Andrey A. Yelizarov
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410089
Baw-Ching Perng, Kung Linliu
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410090
Kung Linliu, Yu-I Wang
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410091
Karl E. Mautz, Thomas Morgenstern
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410092
Karl E. Mautz, Thomas Morgenstern, Ralf Schuster
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410093
Morris Muller
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410095
Jian-Yuan Chiou, D. F. Huang, C. L. Liu, Chih-Chien Hung
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410097
Enrique Rodriguez, Carlos Cano, Javier Sanchez-Vicente, Julian Moreno
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410098
H. M. Sheng, Chen-Cheng Kuoe, L. G. Terng, Dong S. Cheng, Yung H. Liao
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410099
Kazimierz Jerzy Plucinski, Ivan V. Kityk, Bouchta Sahraoui
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410100
Longqing Chen, Jianmin Miao
Proceedings Volume Process Control and Diagnostics, (2000) https://doi.org/10.1117/12.410102
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