Photomask Patterning
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.491928
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458290
Michael J. Bohan, Henry Chris Hamaker, Warren Montgomery
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458301
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458312
Genya Matsuoka, Hidetoshi Satoh, Akira Fujii, Kazui Mizuno, Tetsuji Nakahara, Suyo Asai, Yasuhiro Kadowaki, Hajime Shimada, Hiroshi Touda, et al.
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458323
Materials, Processes, and Process Integration I
Koji Tange, Yoshikazu Nagamura, Kunihiro Hosono, Yuki Oomasa, Koichi Kido, Atsushi Hayashi, Yasutaka Kikuchi, Ichiro Imagawa, Yuichi Matsuzawa, et al.
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458332
Materials, Processes, and Process Integration II
Thomas B. Faure, Cuc Huynh, Michael J. Lercel, Adam Smith, Thomas Wagner
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458343
Hyuk-Joo Kwon, Dong-Soo Min, Pil-Jin Jang, Byung-Soo Chang, Boo-Yeon Choi, Soo-Hong Jeong
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458353
Dirk Beyer, Dirk Loeffelmacher, Gernot Goedl, Peter Hudek, Bernd Schnabel, Thomas Elster
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458252
Woo-Gun Jeong, Si-Woo Lee, Dae-Hong Kim, Young Jin Yoon, Dong-Heok Lee, Boo Yeon Choi, Sang-Soo Choi, Sung-Mo Jung, Soo-Hong Jeong
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458260
Defects, Inspection, and Repair I
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458271
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458279
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458284
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458285
Data Preparation and Design
Leif Odselius, Lars Ivansen, Anders Thuren, Mikhail Savitsky, Jan-Erik Larsson
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458286
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458287
Joan McCall, Vinod Reddy, Hyung Min Kim, Mark Babasa
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458288
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458289
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458291
J. Gordon Hughes, Leslie Drennan
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458292
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458293
Defects, Inspection, and Repair II
Roy White, Martin Verbeek, Ron Bozak, Marty Klos
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458294
Nicholas G. Doe, Richard D. Eandi, Patrick St. Cin
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458295
Mask Metrology, Mask Error, and Specifications
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458296
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458297
Thomas Schaetz, Stefan Doebereiner, Gerd Scheuring, Hans-Juergen Brueck
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458298
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458299
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458300
Advanced Mask Technology I (NGL and 157 nm)
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458302
Advanced Mask Technology II (NGL and 157 nm)
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458303
Christof M. Schilz, Klaus Eisner, Stefan Hien, Thomas Schleussner, Ralf Ludwig, Armin Semmler
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458304
Lawrence Levit, Wei Guan
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458305
Wafer, PSM, and Mask Process Integration
Hiroyoshi Tanabe, Hisatake Sano
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458306
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458307
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458308
Alex H. Buxbaum, Melisa J. Buie, Brigitte C. Stoehr, Warren Montgomery, Scott E. Fuller
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458309
Won D. Kim, Robert D. Bennett, Z. Mark Ma
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458310
Resolution Enhancement Techniques
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458311
Chung-Hsing Chang, San-De Tzu, Chen-Hao Hsieh, Chang-Min Dai, Burn Jeng Lin, Chia-Hui Lin, Hua-Yu Liu
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458313
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458314
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458315
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458316
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458317
Friday Special Session: "Reticle Defects: Will They Break Moore's Law?" I
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458318
Kazuaki Chiba, Hiroyuki Takahashi, Wataru Nozaki, Shinji Akima, Susumu Nagashige, Yoshiro Yamada
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458319
Jacob Doushy, Gregory E. Valentin, Paul Geller
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458320
Friday Special Session: "Reticle Defects: Will They Break Moore's Law?" II
Mark A. Hawkins, Arthur D. Klaum
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458321
Yumiko Maenaka, Norihiko Takatsu, Ichiro Kagami, Daichi Kakuta
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458322
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458324
Peter D. Rhyins, Michael Fritze, David Y. Chan, Chris Carney, B. A. Blachowicz, Marco Vieira, Chris A. Mack
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458325
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458326
Poster Session
Shinsuke Nishimura, Soichiro Mitsui, Munehiro Ogasawara, Kiminobu Akeno, Mitsuko Shimizu, Hideo Kusakabe, Hirotsugu Wada, Kiyoshi Hattori, Shusuke Yoshitake, et al.
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458327
Alexandra Barberet, Gilles L. Fanget, Peter D. Buck, Olivier Toublan, Jean-Charles Richoilley, Michel Tissier
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458328
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458329
Brian Martin, Robert Lloyd, Gareth Davies, Graham G. Arthur
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458330
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458331
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458333
David R. Medeiros, Karen E. Petrillo, James Bucchignano, Marie Angelopoulos, Wu-Song Huang, Wenjie Li, Wayne M. Moreau, Robert Lang, Ranee W. Kwong, et al.
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458334
Se-Jong Choi, Han-Sun Cha, Si-Yeul Yoon, Sung-Mo Jung, Sang-Soo Choi, Soo-Hong Jeong
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458335
Dong-Heok Lee, Dae-Woo Kim, Jung-Kwan Lee, Woo-Gun Jeong, Sang-Soo Choi, Sung-Mo Jung, Soo-Hong Jeong
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458336
Feng Qian, David Y. Chan, Masahiko Ishizuka, Akira Kurabayashi, Takumi Ogawa, Ryoichi Kobayashi, Takaei Sasaki
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458337
Thomas White, Larry J. Watson, Chris Currington, Mary Ann Reyna
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458338
David P. Mancini, Douglas J. Resnick, Kathleen A. Gehoski, Laura L. Popovich, Daniel Chang
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2001) https://doi.org/10.1117/12.458339
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458340
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458341
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458342
Yi-Chiau Huang, Melisa J. Buie, Brigitte C. Stoehr, Alex H. Buxbaum, Guenther G. Ruhl
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458344
Melisa J. Buie, Brigitte C. Stoehr, Yi-Chiau Huang
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458345
Eric P. Cotte, Roxann L. Engelstad, Edward G. Lovell, Yuri M. Shkel, Florence O. Eschbach, Emily Y. Shu, Daniel Tanzil, Rebecca Calhoun
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458346
Stephen Osborne, Eryn Smith, Eric Woster, Anthony Pelayo
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458347
Brian Ashe, Christina Deverich, Paul A. Rabidoux, Barbara Peck, Karen E. Petrillo, Marie Angelopoulos, Wu-Song Huang, Wayne M. Moreau, David R. Medeiros
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458348
Junsik S. Cho, Lee-Ju Kim, Cheol Shin
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458349
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458350
Eiji Tsujimoto, Takahiro Watanabe, Keitaro Katabuchi, Akihiro Nogami, Shuji Shibayama, Hirokazu Sambayashi, Shozo Takaku, Norihiko Takase
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458351
Olaf Filies, Luc de Ridder, Ben Rodriguez, Aart Kujiken
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458352
Corinne Miramond, Dominique Goubier, Michael Chomat, Yorick Trouiller, Yves Fabien Rody, Olivier Toublan
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458354
Vishnu G. Kamat, Kent G. Green, Sejal N. Chheda, Sven Muehle, Venkat Kolagunta, Bill Wilkinson, Cecilia E. Philbin
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458355
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458356
Jerry Huang, Karl F. Y. Chiu, Snow Lee, Shih-Ying Chen, Eric C. Lynn
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458357
Daichi Kakuta, Ichiro Kagami, Tooru Komizo, Hidetoshi Ohnuma
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458358
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458359
Hideo Tsuchiya, Kyoji Yamashita, Shinji Sugihara, Takeshi Fujiwara, Ryoji Yoshikawa
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458360
Tae Moon Jeong, In-Gyun Shin, Dong-Hoon Chung, Sung-Hyuck Kim, Hyoungdo Kim, Seong-Woon Choi, Woo-Sung Han, Jung-Min Sohn
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458361
Jerry Xiaoming Chen, John Riddick, Matt J. Lamantia, Azeddine Zerrade, Robert K. Henderson, Greg P. Hughes, Cyrus Emil Tabery, Khoi A. Phan, Chris A. Spence, et al.
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458362
Shu-Chun Lin, Jian-Hong Chen, Tyng-Hao Hsu, C. C. Hung, Chin-Hsiang Lin
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458363
Parvez Ahammad, Amar Mukherjee
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458364
Nadine Guillaume, Markku Lahti, Michael W. Cresswell, Richard A. Allen, Loren W. Linholm, Mona E. Zaghloul
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458365
Takeshi Ohfuji, Naoko Kuwahara, Masa-aki Kurihara, Naoki Kitano, Shigekazu Fujimoto, Naoya Hayashi, David H. Hwang
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458366
Bryan S. Kasprowicz, Darren Taylor, Michael E Hathorn
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458367
Akemi Moniwa, Fumio Murai
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458368
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458253
Norihiro Katakura, Shin-ichi Takahashi, Masashi Okada, Sumito Shimizu, Shintaro Kawata
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458254
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458255
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458256
James R. Wasson, Diana Convey, Pawitter J. S. Mangat, D. Frank Bazzarre, Lubomir Parobek
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458257
Young-Mog Ham, Sang-Sool Koo, Sang Jin Kim, Won-Kwang Ma, Ki-Soo Shin
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458258
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.443111
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458259
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458261
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458262
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458263
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458264
Han-Sun Cha, Se-Jong Choi, Si-Yeul Yoon, Sung-Mo Jung, Sang-Soo Choi, Soo-Hong Jeong
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458265
Si-Yeul Yoon, Han-Sun Cha, Se-Jong Choi, Sung-Mo Jung, Sang-Soo Choi, Soo-Hong Jeong
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458266
Sang-Man Bae, Moon-Hee Lee, Sang-Chul Kim, Oscar Han
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458267
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458268
Proceedings Volume 21st Annual BACUS Symposium on Photomask Technology, (2002) https://doi.org/10.1117/12.458269