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Mathematical modeling and design of a novel 2-DOF micro attraction actuator for a micro optical switch
Infrastructure for the design and fabrication of MEMS for RF/microwave and millimeter wave applications
Deep lithography with protons as an alternative fabrication technology for high-precision 2D fiber connector components
Real-time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor
Characterization of waferstepper and process-related front- to backwafer overlay errors in bulk micromachining using electrical overlay test structures