Construction and commissioning of cERL IR-FEL for realizing the EUV-FEL for future lithography

Norio Nakamura; Ryukou Kato; Hiroshi Sakai; Kimichika Tsuchiya; Yasunori Tanimoto; Yosuke Honda; Tsukasa Miyajima; Miho Shimada; Takashi Obina; Hiroshi Kawata

doi:10.1117/12.2613617

13 June 2022 Construction and commissioning of cERL IR-FEL for realizing the EUV-FEL for future lithography

Norio Nakamura, Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Takashi Obina, Hiroshi Kawata

Author Affiliations +

Proceedings Volume PC12051, Optical and EUV Nanolithography XXXV; PC120510S (2022) https://doi.org/10.1117/12.2613617
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Conference Poster

Abstract

An ERL-based EUV-FEL can provide EUV power of more than 1 kW for multiple scanners to overcome stochastic effects with a higher throughput. An IR-FEL project started at the KEK cERL as a NEDO project in order to develop high-power IR lasers for high-efficiency laser processing, and it can demonstrate proof of concept of the EUV-FEL for future lithography. The IR-FEL was constructed in May 2020 and commissioned in June to July 2020 and in February to March 2021. We will briefly review the EUV-FEL and present the construction and commissioning of the cERL IR-FEL for realizing the EUV-FEL for future lithography.

Conference Presentation

Citation Download Citation

Norio Nakamura, Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Takashi Obina, and Hiroshi Kawata "Construction and commissioning of cERL IR-FEL for realizing the EUV-FEL for future lithography", Proc. SPIE PC12051, Optical and EUV Nanolithography XXXV, PC120510S (13 June 2022); https://doi.org/10.1117/12.2613617

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available