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15 December 1978 Microprocessor-Based Automatic Heterodyne Interferometer
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Abstract
The interferometer described in this article combines a number of principles known for a long time in a system of unusual versatility. The operation modes range from classical interferometry for visual or photographic evaluation of apertures up to 150 mm diameter, to programmed scan heterodyne interferometry with fringe counting and to time and space resolved subfringe measurement with better than 10 nm resolution.
© (1978) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. M. Mottier "Microprocessor-Based Automatic Heterodyne Interferometer", Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); https://doi.org/10.1117/12.938228
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