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10 February 1981 Grating Profile Reconstruction
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Abstract
A simple low-cost non destructive method has been developed for reconstructing grating profiles. It is based on an inverse scattering, electromagnetic rigorous theory. A computer program has been written for metallic gratings. It makes use of an efficiency curve in a constant deviation mounting and in TE polarization, and reconstitutes the grating profile. Thus the implementation of the reconstruction requires only optical measurements which can be easily performed and do not damage the grating surface. The program has been tested both on numerically simulated data and on actual physical measures, and gives good results.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andre Roger "Grating Profile Reconstruction", Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); https://doi.org/10.1117/12.965641
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