Measurements Of Diffraction Grating Efficiencies In The Vacuum Ultraviolet

W. R. Hunter

doi:10.1117/12.965656

10 February 1981 Measurements Of Diffraction Grating Efficiencies In The Vacuum Ultraviolet

W. R. Hunter

Proceedings Volume 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I; (1981) https://doi.org/10.1117/12.965656
Event: 24th Annual Technical Symposium, 1980, San Diego, United States

Abstract

A technique to measure the efficiency of diffraction gratings in the vacuum ultraviolet spectral region at any angle of incidence has been developed and will be discussed briefly. The measurements show that concave gratings do not have a uniform efficiency over their surfaces, primarily because of the change in blaze angle across the surface. Examples will be shown of results obtained using both conventionally ruled, and holographically recorded, gratings. A short discussion of stray light will be given, followed by a description of the type of contamination found in laboratory instruments and its effect on the efficiency.

Citation Download Citation

W. R. Hunter "Measurements Of Diffraction Grating Efficiencies In The Vacuum Ultraviolet", Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); https://doi.org/10.1117/12.965656

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