Scattering From High Efficiency Diffraction Gratings

G. J. Dunning; M. L. Minden

doi:10.1117/12.965662

10 February 1981 Scattering From High Efficiency Diffraction Gratings

G. J. Dunning, M. L. Minden

Proceedings Volume 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I; (1981) https://doi.org/10.1117/12.965662
Event: 24th Annual Technical Symposium, 1980, San Diego, United States

Abstract

Scatter from high efficiency, reflective diffraction gratings has been characterized. Three major types of scatter are identified: (1) random, which occurs over 27 s.r., (2) band or ghost scatter which occurs in the plane of incidence and (3) structured scatter which is a symmetrical pattern repeated about each order. Measurements were taken at 10.6 pm on gratings made by ruling, ion-etching, holography, or a combination of these techniques. We have found that the characteristic scatter from these high efficiency gratings depends strongly on the way the gratings are fabricated.

Citation Download Citation

G. J. Dunning and M. L. Minden "Scattering From High Efficiency Diffraction Gratings", Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); https://doi.org/10.1117/12.965662

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