Paper
27 May 1982 Hydrogenated Semiconductors As Optical Recording Media
M. A. Bosch
Author Affiliations +
Proceedings Volume 0329, Optical Disk Technology; (1982) https://doi.org/10.1117/12.933391
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States
Abstract
Hydrogenated semiconductor films have been studied for their application as possible optical recording media. We characterize three different recording processes, which are based on hydrogen evolution in amorphous (a) hydrogenated semiconductor materials without melting. Bulges (or bubbles) of ≤μm diameter are created in a-Si:H. The written marks in a-Ge:H resemble a circular sponge-like microswelling. At higher intensity, ablation without melting is occurring in a-Si:H, where holes with sharp edges are produced. These recording materials could be used for low cost archival disks, which would be also adaptable to replication.
© (1982) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. A. Bosch "Hydrogenated Semiconductors As Optical Recording Media", Proc. SPIE 0329, Optical Disk Technology, (27 May 1982); https://doi.org/10.1117/12.933391
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KEYWORDS
Hydrogen

Optical recording

Photomicroscopy

Semiconductors

Scanning electron microscopy

Glasses

Thin films

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