Integrated Circuit (IC) Chip Inspection With Incoherent Optical Processing

F. T.S. Yu; S. L. Zhuang; N. H. Wang

doi:10.1117/12.934116

23 May 1983 Integrated Circuit (IC) Chip Inspection With Incoherent Optical Processing

F. T.S. Yu, S. L. Zhuang, N. H. Wang

Proceedings Volume 0360, Robotics and Industrial Inspection; (1983) https://doi.org/10.1117/12.934116
Event: 26th Annual Technical Symposium, 1982, San Diego, United States

Abstract

In this paper, we propose the use of an incoherent optical image subtraction technique for automatic micro-circuit board inspection. We believe that this proposed technique would have profound effect on automatic inspection scheme in the application of faulty detection and identification of micro-circuitries. The technique would provide the capability of rapid identification, inspection, and possibly utilizing for synthesis and fabrication. Experimental simulation of the IC chip inspection is provided.

Citation Download Citation

F. T.S. Yu, S. L. Zhuang, and N. H. Wang "Integrated Circuit (IC) Chip Inspection With Incoherent Optical Processing", Proc. SPIE 0360, Robotics and Industrial Inspection, (23 May 1983); https://doi.org/10.1117/12.934116

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