Optical Heterodyne Profilometer

C-C . Huang

doi:10.1117/12.936341

15 November 1983 Optical Heterodyne Profilometer

C-C . Huang

Proceedings Volume 0429, Precision Surface Metrology; (1983) https://doi.org/10.1117/12.936341
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

An optical heterodyne profilometer breadboard as been developed and demonstrated with surface roughness measurement sensitivity to 0.1 Å. Optical and electronic common-mode rejection techniques were employed in the optical heterodyne precision phase measurement scheme to resolve the optical phase to one part in thirty thousand. Vibration-induced optical phase jitter in the system was nearly eliminated by these common-mode rejection techniques. This non-contact profilometer is capable of characterizing mirror surfaces not limited only to flat and/or highly reflective surfaces. Concaved surfaces such as the x-ray mirrors for the Advanced X-ray Astrophysical Facility (AXAF) may be characterized as well. Several mirror samples have been characterized with the optical heterodyne profil-ometer which include two x-ray mirror samples. Roughness measurement results on the x-ray mirror samples have been compared with those measured by other methods.

Citation Download Citation

C-C . Huang "Optical Heterodyne Profilometer", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); https://doi.org/10.1117/12.936341

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