Paper
9 December 1983 Absolute Calibration of an Optical Flat
Bernard S. Fritz
Author Affiliations +
Abstract
A method for the absolute calibration of a flat optical surface is described. An algorithm which utilizes the orthogonal properties of the Zernike polynomials was used on interferometric data to fabricate and certify three 10-inch Zerodur reference flats to λ/100 peak-to-valley quality.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernard S. Fritz "Absolute Calibration of an Optical Flat", Proc. SPIE 0433, Contemporary Methods of Optical Manufacturing and Testing, (9 December 1983); https://doi.org/10.1117/12.936799
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KEYWORDS
Zernike polynomials

Wavefronts

Surface finishing

Calibration

Lithium

Interferometers

Polishing

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