Reticle Contamination Monitor For A Wafer Stepper

Akikazu Tanimoto; Kazunori Imamura

doi:10.1117/12.941923

29 June 1984 Reticle Contamination Monitor For A Wafer Stepper

Akikazu Tanimoto, Kazunori Imamura

Proceedings Volume 0470, Optical Microlithography III: Technology for the Next Decade; (1984) https://doi.org/10.1117/12.941923
Event: 1984 Microlithography Conferences, 1984, Santa Clara, United States

Abstract

A reticle contamination monitor having enough sensitivity for a 5:1 stepper has been developed. By scanning a laser spot in a raster mode and monitoring the light scattered by particles, this apparatus can detect spherical beads of 2 μm or larger diameter and various kinds of particles of 5pm or larger size. In order to detect small particles without the disturbance due to the light intensely scattered by reticle patterns, and to distinguish particle light signals from pattern light signals, the monitor has plural detectors arranged to receive scattered light rays that proceed in different directions. It takes two minutes to inspect both surfaces of a reticle of which inspection area is 100mm X 100mm. An automatic reticle transfer mechanism with this monitor is built into a stepper, so that a reticle is moved from a reticle case to both the inspection box and the exposure station without being contaminated. Periodic inspection with this apparatus prevents the deterioration in yield caused by reticle contamination. And a new type of reticle cleaner equipped with this contamination monitor has been developed to make it easy to clean a reticle.

Citation Download Citation

Akikazu Tanimoto and Kazunori Imamura "Reticle Contamination Monitor For A Wafer Stepper", Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); https://doi.org/10.1117/12.941923

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available