Holographic Optical Processing For Submicron Defect Detection

R. L. Fusek; L. H. Lin; K. Harding; S. Gustafson

doi:10.1117/12.946267

12 June 1985 Holographic Optical Processing For Submicron Defect Detection

R. L. Fusek, L. H. Lin, K. Harding, S. Gustafson

Proceedings Volume 0523, Applications of Holography; (1985) https://doi.org/10.1117/12.946267
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States

Abstract

Automated defect detection in highly repetitive subject formats such as integrated circuit photomasks has been the subject of numerous papers in the past.^1-6 Techniques previously reported generally fall into two basic categories - namely digital and optical processing methods. Digital techniques involve the bit by bit or pixel by pixel comparison of information associated with two subjects. One subject is generally a highly magnified image of a portion of a single die. The other subject is either a similar image of a reference die, such as an adjacent die, or the digital data base used to generate the photomask. Optical processing methods differ fundamentally from digital techniques in that the subject information is manipulated not in the image plane, but in the Fourier Transform plane normally formed by a lens. The optical information processing discussed in this paper is limited to spatial frequency filtering.

Citation Download Citation

R. L. Fusek, L. H. Lin, K. Harding, and S. Gustafson "Holographic Optical Processing For Submicron Defect Detection", Proc. SPIE 0523, Applications of Holography, (12 June 1985); https://doi.org/10.1117/12.946267

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