Reactively Sputtered Zirconium Carbides, Carbonitrides And Nitrides Thin Films - Optical Properties

A. M. Bonnot; H. Belkhir; D. Pailharey; P. Mathiez

doi:10.1117/12.966308

2 December 1985 Reactively Sputtered Zirconium Carbides, Carbonitrides And Nitrides Thin Films - Optical Properties

A. M. Bonnot, H. Belkhir, D. Pailharey, P. Mathiez

Proceedings Volume 0562, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion IV; (1985) https://doi.org/10.1117/12.966308
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

The reflectivity spectra of sputtered zirconium nitride, carbide and carbonitride thin films have been studied. The data are interpreted by means of their electronic structure and by the nature of the bonding. The influence of nitrogen and carbon concentrations on the materials is qualitatively understood. Auger electron spectroscopy has been made on the carbide films. The KLL carbon Auger transitions show structures characteristic of the nature of the bonding : carbide or graphite-like. Although no good solar absorber is reported here, these studies show that, by adjusting the carbon and nitrogen contents, the optical profile of ternary compounds of transition metal can be tailored in a wide range between those of the binary compounds, so that the elaboration of a material for photothermal conversion of solar energy is not an impossible challenge.

Citation Download Citation

A. M. Bonnot, H. Belkhir, D. Pailharey, and P. Mathiez "Reactively Sputtered Zirconium Carbides, Carbonitrides And Nitrides Thin Films - Optical Properties", Proc. SPIE 0562, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion IV, (2 December 1985); https://doi.org/10.1117/12.966308

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