Performance of a LSM Spectrogoniometer For Characteristic X-ray lines

M. Arbaoui; R. Barchewitz; J. M. Andre; Y. Lepetre; R. Rivoira

doi:10.1117/12.949692

6 May 1985 Performance of a LSM Spectrogoniometer For Characteristic X-ray lines

M. Arbaoui, R. Barchewitz, J. M. Andre, Y. Lepetre, R. Rivoira

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949692
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

A spectrogoniometer designed to measure the quality of X-ray and X-UV dispersive devices is described. The reflgctivityoof Laye;ed Synthetic Microstructures (LSM's) is presented at three wavelengths (13 Å, 44.8 Å, 67.7 Å) corresponding to the emission lines of Cu, C and B respectively, emitted from a windowless X-ray tube. In particular, performance of Fabry-Perot etalons in the soft X-ray range is discussed. The observation of Cu 2p emission spectrum obtained with an optimized LSM dispersor provides a specific example of LSM's possibilities for X-ray spectroscopy.

Citation Download Citation

M. Arbaoui, R. Barchewitz, J. M. Andre, Y. Lepetre, and R. Rivoira "Performance of a LSM Spectrogoniometer For Characteristic X-ray lines", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949692

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