Thermal Stability of W/C Multilayer Films

Yasuo Takagi; Steven A. Flessa; Keith L. Hart; David A. Pawlik; Alan M. Kadin

doi:10.1117/12.949653

6 May 1985 Thermal Stability of W/C Multilayer Films

Yasuo Takagi, Steven A. Flessa, Keith L. Hart, David A. Pawlik, Alan M. Kadin

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949653
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

W(10A)/C(40A), W(15A)/C(15A) and W(40A)/C(10A) periodic multilayer films were prepared by magnetron sputtering and subsequently annealed at 730°C. The resulting change of the layered and crystal structures was studied by X-ray diffraction. The resulting structures largely depended on the thickness ratio of W to C. For example, in the W(15Å)/C(15Å) sample a-W as formed without any peaks of carbon crystals; in W(40Å) C(10Å)only W2C (orthorhombic) peaks appeared.

Citation Download Citation

Yasuo Takagi, Steven A. Flessa, Keith L. Hart, David A. Pawlik, and Alan M. Kadin "Thermal Stability of W/C Multilayer Films", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949653

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