X-Ray microscope using multilayer optics with a laser-produced plasma source

J. A. Trail; R. L. Byer

doi:10.1117/12.949656

6 May 1985 X-Ray microscope using multilayer optics with a laser-produced plasma source

J. A. Trail, R. L. Byer

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949656
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

All present X-ray microscopes involving focusing optics use synchrotrons as their source of soft X-rays. We describe our design and development to date of a scanning microscope which uses normal incidence multilayer mirrors in a Schwarzschild configuration to focus soft X-rays from a laser produced plasma to a spot diameter of less than 1000A. We compare the expected flux for this microscope with the fluxes expected and achieved by other investigators. The alignment tolerances for the objective were determined by raytracing. These tolerances and proposed means of achieving them will be discussed.

Citation Download Citation

J. A. Trail and R. L. Byer "X-Ray microscope using multilayer optics with a laser-produced plasma source", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949656

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