Thin Film Refractive Index Determination By Different Techniques

G Emiliani; E Masetti,; A Piegari

doi:10.1117/12.938372

13 October 1986 Thin Film Refractive Index Determination By Different Techniques

G Emiliani, E Masetti,, A Piegari

Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938372
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

The refractive index of some dielectric thin films has been determined by three different techniques. Spectrophotometry, ellipsometry and a technique based on the Abeles method are chosen for the analysis of the prepared samples in the visible spectrum. The first technique is the most widely used for obtaining a quick evaluation of the refractive index but, in order to get accurate results, a complex data processing is necessary. The second one is the most accurate but the experimental apparatus is rather complex and a skilled operator is generally required. The third technique is simpler than ellipsometry and a comparable accuracy on the refractive index determination can be obtained but only for transparent films. The relative advantages and limits of these techniques make each of them more or less convenient depending on the sample properties. Results are compared in areas where all three methods are successfully used.

Citation Download Citation

G Emiliani, E Masetti,, and A Piegari "Thin Film Refractive Index Determination By Different Techniques", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938372

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