High Resolution Optical Profilometer

Andrei Brunfeld; Gregory Toker; Joseph Shamir

doi:10.1117/12.939601

23 March 1987 High Resolution Optical Profilometer

Andrei Brunfeld, Gregory Toker, Joseph Shamir

Proceedings Volume 0680, Surface Characterization and Testing; (1987) https://doi.org/10.1117/12.939601
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

The objective of this work was the development of a noncontact method for the measurement of the wavyness of polished surfaces. To obtain simplified measuring procedures interferometric methods were abandoned in favor of a focus seeking system that was developed earlier for machined surface inspection. The system is based on differential detection of the reflected light through two properly prepared and adjusted filters. The filter structure and alignment were investigated to obtain linear response and maximum sensitivity that amounted to 20nm in preliminary experiments.

Citation Download Citation

Andrei Brunfeld, Gregory Toker, and Joseph Shamir "High Resolution Optical Profilometer", Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); https://doi.org/10.1117/12.939601

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