Spectroellipsometric Characterization Of Inhomogeneous Films

B. A. Tirri; A. Turner; P. C. Van Buskirk

doi:10.1117/12.940922

22 April 1987 Spectroellipsometric Characterization Of Inhomogeneous Films

B. A. Tirri, A. Turner, P. C. Van Buskirk

Proceedings Volume 0794, Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices; (1987) https://doi.org/10.1117/12.940922
Event: Advances in Semiconductors and Semiconductor Structures, 1987, Bay Point, FL, United States

Abstract

Determination of the compositional depth profile of an inhomogeneous film structure is often approached via surface analysis techniques used in a sputter depth profiling mode. An alternative is to model the compositional profile to fit optical measurement data, such as multiple incident angle or spectroscopic ellipsometric data. This paper presents the application of a statistical approach to this analysis problem. Multiple incident angle and multiple wavelength ellipsometer measurements have been made on hafnia and alumina single films on borosilicate glass substrates. Theoretical sensitivity data of the measured quantities T, A on the index and thickness of the film is presented and discussed. The measurement data is then numerically fit to several models that express small inhomogeneities in the film refractive index as a system of multiple homogeneous films. Existence of local minima in the value of the chosen merit function and statistical techniques that permit location of the global minimum are addressed by 'this approach. Results are discussed in terms of the magnitude of the merit function and compared to spectral reflectance measurements made on the coated samples.

Citation Download Citation

B. A. Tirri, A. Turner, and P. C. Van Buskirk "Spectroellipsometric Characterization Of Inhomogeneous Films", Proc. SPIE 0794, Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices, (22 April 1987); https://doi.org/10.1117/12.940922

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available