Application Of Confocal Beam Scanning Microscopy To The Measurement Of Submicron Structures

Roelof W. Wijnaendts-van-Resandt; Ch. Ihrig

doi:10.1117/12.941504

3 August 1987 Application Of Confocal Beam Scanning Microscopy To The Measurement Of Submicron Structures

Roelof W. Wijnaendts-van-Resandt, Ch. Ihrig

Proceedings Volume 0809, Scanning Imaging Technology; (1987) https://doi.org/10.1117/12.941504
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

Confocal laser microscopy extends the applicability of optical methods to sub-micron structure measurements. A beam scanning system developed by Heidelberg Instruments GmbH is presented. The contribution includes a detailed comparison between beam scanning and object scanning microscopes. A number of practical applications of the beam scanning system in the field of biology and integrated circuit metrology are presented.

Citation Download Citation

Roelof W. Wijnaendts-van-Resandt and Ch. Ihrig "Application Of Confocal Beam Scanning Microscopy To The Measurement Of Submicron Structures", Proc. SPIE 0809, Scanning Imaging Technology, (3 August 1987); https://doi.org/10.1117/12.941504

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