Acoustic Microscopy

B T Khuri-Yakub

doi:10.1117/12.944528

12 July 1988 Acoustic Microscopy

B T Khuri-Yakub

Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944528
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Acoustic microscopy has been growing steadily since the development of the first microscope in the mid-seventies. Since that date, acoustic microscopes have been used as both qualitative tools for imaging, and quantitative tools for the characterization of materials. The frequency range, and thus resolution, of acoustic microscopes covers several decades which makes the methodology useful for examining materials with spatial resolutions ranging from millimeters to Angstroms. In this paper, we will review the principle of operation of the microscope, show some imaging results, and present some quantitative measurements of samples using both amplitude only and amplitude and phase measuring microscopes. We will also show some recent results of quantitative measurements of anisotropy and surface residual stress that are possible with new types of lenses.

Citation Download Citation

B T Khuri-Yakub "Acoustic Microscopy", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); https://doi.org/10.1117/12.944528

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available