Submicron Imaging Capabilities Of A 0.40 na Broadband Optical System

H. M. Nishimoto; E. Tai; R. J. Naber; J. F. Chen; A. Nalamwar

doi:10.1117/12.968428

1 January 1988 Submicron Imaging Capabilities Of A 0.40 NA Broadband Optical System

H. M. Nishimoto, E. Tai, R. J. Naber, J. F. Chen, A. Nalamwar

Proceedings Volume 0922, Optical/Laser Microlithography; (1988) https://doi.org/10.1117/12.968428
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

The submicron resolution capabilities, depth of focus, critical dimension control, and process latitude of a 1:1 0.40 NA lens using some of the newer high contrast resists were studied. Over the 3.5 cm2 field size the lens resolved 0.6 microns with a 0.8 to 1.6μ depth of focus. The depth of focus for 0.7μ features was found to range between 1.6 to 2.0μ. Resolution of 0.5μ with a 1.0μ depth of focus was achieved over a limited field size. The critical dimension measurements show that through focus 98% of the data stays within ±10% of the measured feature size. This critical dimension control and the improvement in resolution to 0.6 microns across the field indicates that the practical resolution of the lens can be better predicted by using 0.7 λ/NA. The application of this lower practical linewidth size to space-bandwidth-product was demonstrated.

Citation Download Citation

H. M. Nishimoto, E. Tai, R. J. Naber, J. F. Chen, and A. Nalamwar "Submicron Imaging Capabilities Of A 0.40 NA Broadband Optical System", Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); https://doi.org/10.1117/12.968428

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