Application Of Vector Scan E-Beam Lithography In Fabrication Of Gaas Devices

John B Bickley; Bernard A Wallman

doi:10.1117/12.945651

14 June 1988 Application Of Vector Scan E-Beam Lithography In Fabrication Of Gaas Devices

John B Bickley, Bernard A Wallman

Proceedings Volume 0923, Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII; (1988) https://doi.org/10.1117/12.945651
Event: Medical Imaging II, 1988, Newport Beach, CA, United States

Abstract

The growing interest in the use of Gallium Arsenide semiconductor materials has presented many opportunities for device operational speed improvements but has also presented many problems for the device maker. In particular a whole new range of processing techniques have been needed which are significantly different to those used routinely in Silicon processing. In addition, to obtain the best operational characteristics, device feature dimensions, linewidth tolerance and overlay accuracies are significantly more demanding than current silicon practices require. This "lithographic challenge" is at its most extreme where microwave active components like MESFET transistors are required. Present day routine devices require 0.5 to 0.25 micron gate lengths whilst leading edge devices need 0.1 micron or below complicated by the need for fabrication in three dimensions for "T" section structures. These are necessary to provide adequate gate conductivity and power handling whilst maintaining the narrow gate length contact.

Citation Download Citation

John B Bickley and Bernard A Wallman "Application Of Vector Scan E-Beam Lithography In Fabrication Of Gaas Devices", Proc. SPIE 0923, Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII, (14 June 1988); https://doi.org/10.1117/12.945651

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available