High Resolution, Novolak Based Negative Tone Electron Beam Resist

Mark deGrandpre; Karen Graziano; Stephen D Thompson; Hua-yu Liu; Lauren Blum

doi:10.1117/12.945645

14 June 1988 High Resolution, Novolak Based Negative Tone Electron Beam Resist

Mark deGrandpre, Karen Graziano, Stephen D Thompson, Hua-yu Liu, Lauren Blum

Proceedings Volume 0923, Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII; (1988) https://doi.org/10.1117/12.945645
Event: Medical Imaging II, 1988, Newport Beach, CA, United States

Abstract

A novel, aqueous alkaline developable, sensitive electron beam resist is described. This resist is a three component system consisting of a novolak resin, aminoplast, and a radiation sensitive acid generator (RSAG). The resist has demonstrated high resolution (0.3 μm grating in 0.5 μm thick resist) with under 5uC/cm² exposure dose. Furthermore, the resulting resist images exhibit dry etch stability comparable to optical positive novolak resists. This paper describes the chemistry of this novel resist system. The mechanism of the crosslinking reaction is discussed using data from GPC, FT IR and GCMS as analytical probes. The variation of sensitivity and contrast with resist composition has been analyzed as well. The paper addresses the nature of the post exposure "dark reaction" in this resist and compares it to other electron beam resists (eg. COP) known to exhibit a strong time dependence on processing. Electrical linewidth studies and scanning electron microscopy data are employed in these studies.

Citation Download Citation

Mark deGrandpre, Karen Graziano, Stephen D Thompson, Hua-yu Liu, and Lauren Blum "High Resolution, Novolak Based Negative Tone Electron Beam Resist", Proc. SPIE 0923, Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII, (14 June 1988); https://doi.org/10.1117/12.945645

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available